AlGaAs/InGaAs/GaAs heterostructures for pHEMT switching transistors
نویسندگان
چکیده
The pHEMT heterostructures optimized in this work to improve the parameters of switching microwave transistors have a one-sided delta-doping at 6· 10 12 cm -2 and an AlAs/GaAs spacer. Such were used fabricate monolithic integrated circuits single-pole double throw switches with gate length width 0.5 μm 100 μm, respectively. resulting had following parameters: g max =400 mS/mm, saturation current I D =380 mA/mm, ON-state resistance 1.0 Ω· mm, OFF-state capacitance 0.37 pF/mm. switch 20 GHz are: insertion loss -2.2 dB, isolation -56 return -11.7 linearity P 1 dB =21 dBm IIP 3 =40 dBm. Keywords: Single-side doping, spacer design, maximal conductivity, pHEMT, switches.
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ژورنال
عنوان ژورنال: Pis?ma v Žurnal tehni?eskoj fiziki
سال: 2022
ISSN: ['1726-7471', '0320-0116']
DOI: https://doi.org/10.21883/tpl.2022.09.55075.19260